Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424465 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Hyunsoo Chun, Jiho Uh | 2025-09-23 |
| 11948814 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Hyunsoo Chun, Jiho Uh | 2024-04-02 |