Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464350 | Deposition substrate temperature and monitoring | Richard S. Mullin, Anatoly Kuzmichev, Igor V. Belousov, Yuriy G. Kononenko, Oleg G. Pankov | 2016-10-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464350 | Deposition substrate temperature and monitoring | Richard S. Mullin, Anatoly Kuzmichev, Igor V. Belousov, Yuriy G. Kononenko, Oleg G. Pankov | 2016-10-11 |