Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6572710 | Brush force control method for a substrate cleaning apparatus | Daniel O. Middendorf, Thomas Slavik, James G. Johnson | 2003-06-03 |
| 6446296 | Substrate cleaning apparatus with brush force control and method | Daniel O. Middendorf, Thomas Slavik, James G. Johnson | 2002-09-10 |