Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282696 | Method and device for wet processing integrated circuit substrates using a mixture of chemical steam vapors and chemical gases | — | 2022-03-22 |
| 6200387 | Method and system for processing substrates using nebulized chemicals created by heated chemical gases | — | 2001-03-13 |