Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115572 | Methods for in-situ chamber clean in plasma etching processing chamber | Banqiu Wu, Xiaoyi Chen | 2018-10-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115572 | Methods for in-situ chamber clean in plasma etching processing chamber | Banqiu Wu, Xiaoyi Chen | 2018-10-30 |