| 7709377 |
Thin film including multi components and method of forming the same |
Jung-hyun Lee, Yo-sep Min, Young Jin Cho |
2010-05-04 |
| 6752869 |
Atomic layer deposition using organometallic complex with &bgr;-diketone ligand |
Jung-hyun Lee, Yo-sep Min, Young Jin Cho |
2004-06-22 |
| 6689427 |
Group IV metal precursors and a method of chemical vapor deposition using the same |
Yo-sep Min, Young Jin Cho, Ik Mo Lee, Sun Kwon Lim, Wan-in Lee +1 more |
2004-02-10 |
| 6669990 |
Atomic layer deposition method using a novel group IV metal precursor |
Yo-sep Min, Young Jin Cho, Jung-hyun Lee |
2003-12-30 |
| 6424800 |
Bubbler |
— |
2002-07-23 |
| 6333066 |
Method for forming PZT thin film using seed layer |
— |
2001-12-25 |
| 6080593 |
Method of manufacturing ferroelectric memory |
Il-sub Chung |
2000-06-27 |
| 5632210 |
High temperature incinerator for bio-active solid wastes |
— |
1997-05-27 |
| 5603169 |
Bubbler for solid metal-organic percursors |
— |
1997-02-18 |
