Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7160179 | Methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Aaron Trent Ward | 2007-01-09 |
| 7052375 | Method of making carrier head backing plate having low-friction coating | Aaron Trent Ward | 2006-05-30 |
| 7014535 | Carrier head having low-friction coating and planarizing machine using same | Aaron Trent Ward | 2006-03-21 |
| 6787055 | Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Aaron Trent Ward | 2004-09-07 |
| 6627098 | Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Aaron Trent Ward | 2003-09-30 |
| 6425802 | Apparatus for supplying flush fluid | Scott E. Moore | 2002-07-30 |
| 6227955 | Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Aaron Trent Ward | 2001-05-08 |
| 6146246 | Method for supplying flush fluid | Scott E. Moore | 2000-11-14 |
| 6102782 | System and apparatus for distributing flush fluid to processing equipment | Scott E. Moore | 2000-08-15 |