Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7717696 | Apparatus for double-sided imprint lithography | Stephen Y. Chou, Linshu Kong, Mingtao Li, Hua Tan, Lin Hu | 2010-05-18 |
| 6473987 | Method for measuring wafer thickness | Robert E. Steere, III | 2002-11-05 |
| 6055694 | Wafer scrubbing machine | — | 2000-05-02 |