Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387970 | Single wafer spin cleaning apparatus with soaking, cleaning, and etching functions | Li-tso HUANG, Hsiu-kai CHANG, Ming-Che Hsu | 2025-08-12 |
| 12128452 | Multifunctional single wafer soaking-spinning-cleaning device and wafer processing method | Li-tso HUANG, Hsiu-kai CHANG, Ming-Che Hsu | 2024-10-29 |