Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728160 | Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device | Younsoo Kim, Haeryong KIM, Seungmin Ryu, Sunmin MOON, Jeonggyu SONG +2 more | 2023-08-15 |
| 11081338 | Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device | Younsoo Kim, Haeryong KIM, Seungmin Ryu, Sunmin MOON, Jeonggyu SONG +2 more | 2021-08-03 |