Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055498 | Data processing method and system for detection of deterioration of semiconductor process kits | Feng Shen, Hung-Chia Su | 2024-08-06 |
| 11320381 | Deterioration detecting system and method for semiconductor process kits | Feng Shen, Hung-Chia Su | 2022-05-03 |