Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6273961 | Method for cleaning semiconductor processing equipment by reducing particles | Narendra Patel | 2001-08-14 |
| 6134742 | Apparatus for particle reduction in semiconductor processing equipment | Narendra Patel | 2000-10-24 |