Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972548 | FinFET electrical characterization with enhanced hall effect and probe | — | 2018-05-15 |
| 9831136 | Film thickness metrology | — | 2017-11-28 |
| 9459226 | Lens coating/contamination electronic detection | — | 2016-10-04 |
| 9263348 | Film thickness metrology | — | 2016-02-16 |
| 9224661 | Film thickness metrology | — | 2015-12-29 |
| 9116038 | Integrated optical illumination reference source | — | 2015-08-25 |
| 8990961 | Non-linearity determination of positioning scanner of measurement tool | George W. Banke, Jr., James M. Robert | 2015-03-24 |
| 8037736 | Non-linearity determination of positioning scanner of measurement tool | George W. Banke, Jr., James M. Robert | 2011-10-18 |
| 7508511 | Method and apparatus for improved ellipsometric measurement of ultrathin films | — | 2009-03-24 |
| 7394539 | Method and apparatus for improved ellipsometric measurement of ultrathin films | — | 2008-07-01 |
| 7280209 | Method and apparatus for improved ellipsometric measurement of ultrathin films | — | 2007-10-09 |
| 6462817 | Method of monitoring ion implants by examination of an overlying masking material | — | 2002-10-08 |