Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490923 | Micromechanical rpm sensor | Uwe Breng, Martin Hafen, Eberhard Handrich | 2002-12-10 |
| 6374671 | Method of stimulating an oscillator control for capacitive measurement of strength, acceleration and/or rotation speed | Gunter Spahlinger, Walter Gutmann | 2002-04-23 |
| 6119517 | Micro-mechanical rate-of-rotation sensor with coupled structure | Uwe Breng, Steffen Zimmermann | 2000-09-19 |
| 5959206 | Micromechanical rotation speed sensor | Eberhard Handrich, Uwe Breng, Martin Hafen | 1999-09-28 |
| 5614742 | Micromechanical accelerometer with plate-like semiconductor wafers | Thomas Gessner, Martin Hafen, Eberhard Handrich, Peter Leinfelder, Egbert Vetter +1 more | 1997-03-25 |
| 5504032 | Micromechanical accelerometer and method of manufacture thereof | Thomas Gessner, Martin Hafen, Eberhard Handrich, Peter Leinfelder, Egbert Vetter +1 more | 1996-04-02 |
| 4953834 | Pendulum with bending spring joint | Wolfram Ebert, Eberhard Handrich, Martin Hafen | 1990-09-04 |