Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6588081 | Small footprint direct drive mechanical positioning stage | Stephen J. Botos | 2003-07-08 |
| 6442851 | Direct drive tilt and goniometer stage | Stephen J. Botos, Albert P. Ciez | 2002-09-03 |