Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9836031 | Method of controlling a production process using prediction model output directly linking interacted probe radiation information with morphological process step control parameters | Poul Gregersen | 2017-12-05 |
| 7486388 | Method and apparatus for standardization of a measuring instrument | Mark Westerhaus, Sven-Anders Nilsson, Anders Ebelin | 2009-02-03 |
| 7227623 | Method and apparatus for standardization of a measuring instrument | Mark Westerhaus, Sven-Anders Nilsson, Anders Ebelin | 2007-06-05 |