| 9214368 |
Laser diode array with fiber optic termination for surface treatment of materials |
William Shiner |
2015-12-15 |
| 8652974 |
Method and system for pre-heating of semiconductor material for laser annealing and gas immersion laser doping |
— |
2014-02-18 |
| 8236677 |
RTA for fabrication of solar cells |
— |
2012-08-07 |
| 7915154 |
Laser diffusion fabrication of solar cells |
— |
2011-03-29 |
| 7135069 |
Coating silicon pellets with dopant for addition of dopant in crystal growth |
— |
2006-11-14 |
| 6740158 |
Process for coating silicon shot with dopant for addition of dopant in crystal growth |
— |
2004-05-25 |
| 6660643 |
Etching of semiconductor wafer edges |
Michael J. Kardauskas |
2003-12-09 |
| 6423928 |
Gas assisted laser cutting of thin and fragile materials |
— |
2002-07-23 |
| 6376797 |
Laser cutting of semiconductor materials |
Juris P. Kalejs |
2002-04-23 |
| 5724121 |
Mounting member method and apparatus with variable length supports |
William G. McKinley, John Robert Burgess |
1998-03-03 |
| 4801352 |
Flowing gas seal enclosure for processing workpiece surface with controlled gas environment and intense laser irradiation |
— |
1989-01-31 |
| 4749840 |
Intense laser irradiation using reflective optics |
— |
1988-06-07 |