Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4994141 | Method of manufacturing a mask support of SiC for radiation lithography masks | Margret Harms, Holger Luthje | 1991-02-19 |
BM
Bernd Matthiesen
Overall (All Time): #3,870,388 of 4,157,543Top 95%
1
Patents All Time