Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4608118 | Reactive sputter etching of metal silicide structures | Hans R. Brunner | 1986-08-26 |
| 4433044 | Dry developable positive photoresists | Wolfgang Meyer | 1984-02-21 |
| 4421593 | Reverse etching of chromium | Martin Ebnoether | 1983-12-20 |
| 4328068 | Method for end point detection in a plasma etching process | — | 1982-05-04 |