Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4476151 | Method and device for attaching disc-or plate-shaped target bodies to cooling plates for sputtering systems | Hartmut Keller | 1984-10-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4476151 | Method and device for attaching disc-or plate-shaped target bodies to cooling plates for sputtering systems | Hartmut Keller | 1984-10-09 |