Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211711 | Baking apparatus | Bumjin Jang, Seunghwa Kang, Sungyong Park, Kiju Sohn, Wonguk Seo | 2025-01-28 |
| 12119240 | Substrate drying device and method of drying substrate using the same preliminary class | Sungyong Park, Sejin Park, Donok Choi | 2024-10-15 |
| 11590460 | Chemical solution evaporation device and substrate processing device including the same | Wonguk Seo, Sungyong Park, Hongju Kim, Seok-Won Heo, Yinghu Xu | 2023-02-28 |