Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9211563 | Coating apparatus and method | Erkan Koparal | 2015-12-15 |
| 9175383 | Double-coating device with one process chamber | — | 2015-11-03 |
| 6740207 | Electric supply unit and method for reducing arcing during sputtering | Christoph Daube, Johannes Stollenwerk, Thomas Linz | 2004-05-25 |