Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4946751 | Method of manufacturing a mask for radiation lithography | Waldemar Gotze, Margret Harms, Holger Luthje | 1990-08-07 |
| 4941942 | Method of manufacturing a mask support of sic for x-ray lithography masks | Margret Harms, Holger Luthje, Bernd Matthiessen | 1990-07-17 |
| 4606803 | Method of manufacturing a mask for the production of patterns in lacquer layers by means of X-ray lithography | Holger Luthje, Margret Harms, Bernd Matthiessen | 1986-08-19 |
| 4555460 | Mask for the formation of patterns in lacquer layers by means of X-ray lithography and method of manufacturing same | Margret Harms, Holger Luthje, Bernd Matthiessen | 1985-11-26 |