Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624584 | Particle source for producing excited particles | Horst Schmidt-Boecking, Lutz Spielberger, Maria Cristina Penache, Sven Schoessler, Till Jahnke +2 more | 2003-09-23 |