Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837436 | Waveform generating device, waveform generating method, and charged particle beam irradiation apparatus | Michihiko IKEDA, Kuniaki Kawahara | 2023-12-05 |
| 8290743 | Charged particle beam writing apparatus and method for diagnosing DAC amplifier unit in charged particle beam writing apparatus | Seiichi Tsuchiya | 2012-10-16 |