Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6218278 | Method of forming a conducting structure | Boris Gurovich, Evgeny P. Velikhov, Evgenia Anatolievna Kuleshova, Boris Aronovich Aronzon, Evgeny Zalmanovich Meilikhov +6 more | 2001-04-17 |
| 6004726 | Method of forming a lithographic pattern utilizing charged beam particles between 0.1 and 5.0 ev | Boris Gurovich, Evgeny P. Velikhov, Evgenia Anatolievna Kuleshova, Boris Aronovich Aronzon, Evgeny Zalmanovich Meilikhov +6 more | 1999-12-21 |