Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203874 | EUV microscope | Chami N. Perera, Charles Graeme Murray, Alexander N. Khodarev, Travis W. Grodt | 2025-01-21 |
| 11960202 | EUV mask defect tool apparatus | Chami N. Perera, Charles Graeme Murray, Alexander N. Khodarev, Travis W. Grodt | 2024-04-16 |