Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5572398 | Tri-polar electrostatic chuck | Peter Federlin, Lee Chuin Chen | 1996-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5572398 | Tri-polar electrostatic chuck | Peter Federlin, Lee Chuin Chen | 1996-11-05 |