Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367638 | Load port | Yu-Min Chu, Chia-Hsiu Huang | 2022-06-21 |
| 11189513 | Transport mechanism for wafers of different sizes and types | Yu-Min Chu, Chia-Hsiu Huang | 2021-11-30 |
| 10319614 | Wafer leveling device | Wen Ren Wu | 2019-06-11 |