Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11633834 | Method for repairing polishing pad in real time | Chao Chen, Jian-Shian Lin, Chun-Chen Chen, Jen-Chien Li, Hsien-Ming Lee | 2023-04-25 |
| 11491608 | Detection method and detection apparatus for polishing pad of chemical mechanical polishing device | Hsien-Ming Lee, Chun-Chen Chen, Po-Ching Huang | 2022-11-08 |
| 11359906 | Method, system and apparatus for uniformed surface measurement | Chao Chen, Jen-Chieh Li, Yong-Jie Ciou, Hsien-Ming Lee, Jian-Shian Lin +1 more | 2022-06-14 |