Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616758 | Method and apparatus for spin coating | Lotar Peter Mahneke, Ying CHEN | 2003-09-09 |
| 6248670 | Method of wet processing | Ta-Hsing Fu | 2001-06-19 |
| 6027602 | Wet processing apparatus | Ta-Hsing Fu | 2000-02-22 |