Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6215641 | Electrostatic device for supporting wafers and other components for use at temperatures of up to 230.degree. C. | Karl-Hermann Busse | 2001-04-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6215641 | Electrostatic device for supporting wafers and other components for use at temperatures of up to 230.degree. C. | Karl-Hermann Busse | 2001-04-10 |