Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362274 | Blowing port for clean air of an apparatus for washing semiconductor materials | — | 1994-11-08 |
| 5159946 | Over-flow tank for a semiconductor wafer washing apparatus | — | 1992-11-03 |
| 4848006 | Spin drier for semiconductor materials | — | 1989-07-18 |
| 4753258 | Treatment basin for semiconductor material | — | 1988-06-28 |