Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5844683 | Position sensor system for substrate holders | Andrew Pavloski, Dmitry Sklyar | 1998-12-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5844683 | Position sensor system for substrate holders | Andrew Pavloski, Dmitry Sklyar | 1998-12-01 |