Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11661332 | Stiction reduction system and method thereof | Daesung Lee, Alan Cuthbertson, Emad Mehdizadeh | 2023-05-30 |
| 11655139 | Active stiction recovery | — | 2023-05-23 |
| 11220423 | Reduced MEMS cavity gap | Dongyang Kang | 2022-01-11 |
| 11211258 | Method of addressing dissimilar etch rates | — | 2021-12-28 |
| 11174151 | Integrated MEMS cavity seal | — | 2021-11-16 |
| 10941033 | 3D stack configuration for 6-axis motion sensor | Dongyang Kang, Bongsang Kim, Bei Zhu | 2021-03-09 |