| 9044774 |
Vented combinatorial processing cell |
Aaron Francis, Kenneth Williams |
2015-06-02 |
| 9016233 |
Volume combinatorial processing chamber |
Kurt H. Weiner, Aaron Francis |
2015-04-28 |
| 8707897 |
Combinatorial processing chamber having electrical contacts |
Greg Lim, Gauray Vorma, Kurt H. Weiner, Zachary Fresco |
2014-04-29 |
| 8414703 |
Advanced mixing system for integrated tool having site-isolated reactors |
Kurt H. Weiner, Tony P. Chiang, Aaron Francis |
2013-04-09 |
| 8207069 |
Advanced mixing method for integrated tool having site-isolated reactors |
Kurt H. Weiner, Tony P. Chiang, Aaron Francis |
2012-06-26 |
| 8082045 |
Substrate processing recipe manager |
Yoshiki Ashizawa, Heng-Cheng Pal, Patrick Ngatchou, Kurt H. Weiner |
2011-12-20 |
| 8011317 |
Advanced mixing system for integrated tool having site-isolated reactors |
Kurt H. Weiner, Tony P. Chiang, Aaron Francis |
2011-09-06 |
| 5082572 |
Ash vibration process and apparatus |
— |
1992-01-21 |
| 4186363 |
Solenoid assembly for elevated temperature service |
Donald E. Martin |
1980-01-29 |