Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864144 | Method of stabilizing resist material through ion implantation | Christopher Kenyon, Gerard Zietz | 2005-03-08 |
| 6649529 | Method of substrate processing and photoresist exposure | Mehran Aminzadeh | 2003-11-18 |