Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9122169 | Mask layout patterns for closely spaced primitives in phase shift photolithography masks | Bin Hu, Vivek Singh, Sungwon Kim, Chulwoo Oh | 2015-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9122169 | Mask layout patterns for closely spaced primitives in phase shift photolithography masks | Bin Hu, Vivek Singh, Sungwon Kim, Chulwoo Oh | 2015-09-01 |