Jeffrey N. Farnsworth

IN Intel: 1 patents #18,218 of 30,777Top 60%

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Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
5700602	Method and apparatus for precision determination of phase-shift in a phase-shifted reticle	Giang T. Dao, Nelson Tam, Gang Kevin Liu	1997-12-23