Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395883 | Aperture size modulation to enhance ebeam patterning resolution | Shakul Tandon, Mark C. Phillips | 2019-08-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395883 | Aperture size modulation to enhance ebeam patterning resolution | Shakul Tandon, Mark C. Phillips | 2019-08-27 |