Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10395883 | Aperture size modulation to enhance ebeam patterning resolution | Shakul Tandon, Mark C. Phillips | 2019-08-27 | $17,353,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10395883 | Aperture size modulation to enhance ebeam patterning resolution | Shakul Tandon, Mark C. Phillips | 2019-08-27 | $17,353,000 |