| 7736747 |
Silicon parts joined by a silicon layer preferably plasma sprayed |
James E. Boyle |
2010-06-15 |
| 7074693 |
Plasma spraying for joining silicon parts |
James E. Boyle |
2006-07-11 |
| 6979659 |
Silicon fixture supporting silicon wafers during high temperature processing |
Raanan Zehavi, James E. Boyle |
2005-12-27 |
| 6727191 |
High temperature hydrogen anneal of silicon wafers supported on a silicon fixture |
Raanan Zehavi, James E. Boyle |
2004-04-27 |
| 6617225 |
Method of machining silicon |
James E. Boyle, Robert L. Davis, Raanan Zehavi |
2003-09-09 |
| 6455395 |
Method of fabricating silicon structures including fixtures for supporting wafers |
James E. Boyle, Robert L. Davis, Raanan Zehavi |
2002-09-24 |
| 6450346 |
Silicon fixtures for supporting wafers during thermal processing |
James E. Boyle, Robert L. Davis, Raanan Zehavi |
2002-09-17 |