| 5194406 |
Installation for transport and processing under a pulsating double-floating condition |
Ronald J. W. Barlag |
1993-03-16 |
| 4724128 |
Method for purifying molybdenum |
Michael J. Cheresnowsky, Martin B. MacInnis |
1988-02-09 |
| 4681776 |
Improved method for double floating transport and processing of wafers |
— |
1987-07-21 |
| 4663197 |
Method and apparatus for coating a substrate |
— |
1987-05-05 |
| 4662987 |
Method of double floating transport and processing of wafers within a confined passageway |
— |
1987-05-05 |
| 4622918 |
Module for high vacuum processing |
— |
1986-11-18 |
| 4620997 |
Method for coating substrates |
— |
1986-11-04 |
| 4600471 |
Method and apparatus for transport and processing of substrate with developing agent |
— |
1986-07-15 |
| 4594129 |
Installation for floating transport and processing of substrates |
— |
1986-06-10 |
| 4587002 |
Apparatus for floating transport and processing of substrate or tape |
— |
1986-05-06 |
| 4576109 |
Apparatus for applying a coating on a substrate |
— |
1986-03-18 |
| 4575408 |
Method for floating transport of substrates |
— |
1986-03-11 |
| 4560590 |
Method for applying a coating on a substrate |
— |
1985-12-24 |
| 4521268 |
Apparatus for deposition of fluid and gaseous media on substrates |
— |
1985-06-04 |
| 4495024 |
Method for deposition of fluid and gaseous media on substrates for their transport |
— |
1985-01-22 |
| 4318626 |
Pen with an improved ink injection system |
— |
1982-03-09 |