Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11365964 | Stitching-measurement device and stitching-measurement method | Fuchao Xu, Xin Jia, Dachun Gan | 2022-06-21 |
| 11268808 | Detection device for detecting lens surface in stitching interferometer | Dachun Gan, Fuchao Xu, Xin Jia | 2022-03-08 |
| 10976670 | Apparatus and method for detecting optimal focal plane of lithographic projection objective lens | Jiajun XU, Zhixiang Jason Liu, Wumei Lin | 2021-04-13 |
| 9250059 | Detection devices and methods using diffraction wavefront of a pinhole stitching measurement of surface shape | Xin Jia, Jiajun XU, Fuchao Xu, Weimin XIE | 2016-02-02 |
| 8842292 | Apparatus and method for detecting optical profile | Xin Jia | 2014-09-23 |
| 6330524 | Scanning optical system | Takatoshi Suzuki | 2001-12-11 |