LM

Lingkkuan Meng

IS Institute Of Microelectronics Of The Chinese Academy Of Sciences: 1 patents #148 of 281Top 55%
Overall (All Time): #3,124,509 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8828881 Etch-back method for planarization at the position-near-interface of an interlayer dielectric Huaxiang Yin 2014-09-09