JL

Junfong Li

IS Institute Of Microelectronics Of The Chinese Academy Of Sciences: 1 patents #148 of 281Top 55%
Overall (All Time): #3,153,680 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8409986 Method for improving within die uniformity of metal plug chemical mechanical planarization process in gate last route Tao Yang, Chao Zhao 2013-04-02