Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9260297 | Cantilever beam structure where stress is matched and method of manufacturing the same | Ruiwen Liu, Zhigang Li, Yanmei Kong, Dapeng Chen | 2016-02-16 |
| 8652867 | Micrometer-scale grid structure based on single crystal silicon and method of manufacturing the same | Dapeng Chen | 2014-02-18 |