Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7908024 | Method and system for detecting tool errors to stop a process recipe for a single chamber | Chun-Hsiang Chen, Keng-Hsien Ho, Chien-Lung Tseng, Hung-Chih Kuo | 2011-03-15 |
| 6225187 | Method for STI-top rounding control | Tse-Yao Huang | 2001-05-01 |