Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8831765 | Method for operating an automatic handling system applied to many wafer processing apparatuses | Tsan-I Chen | 2014-09-09 |
| 8596200 | Bidirectional wafer carrying pod and wafer transfer system | Tsan-I Chen | 2013-12-03 |
| 8457779 | Multi-track handling and storage apparatus and method thereof | Huan-Cheng Lin | 2013-06-04 |
| 8055373 | Automatic wafer storage system and a method for controlling the system | Huan-Cheng Lin | 2011-11-08 |