Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7009193 | Utilization of an ion gauge in the process chamber of a semiconductor ion implanter | Michael Wright, Karl Peterson | 2006-03-07 |
| 7001856 | Method of calculating a pressure compensation recipe for a semiconductor wafer implanter | Karl Peterson, Michael Wright | 2006-02-21 |