Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10186440 | Adapter tool configured to be attached to a loadport of a wafer handling system and wafer handling system with such an adapter tool | Michael Larisch, Michael Walser | 2019-01-22 |
| 9698038 | Adapter tool and wafer handling system | Michael Larisch, Michael Walser | 2017-07-04 |
| 6158567 | Trip device | Wolfgang Kuhn, Roland Steidle | 2000-12-12 |